Particle deposition ISO 14644-17-2021

The Particle Monitoring Unit (PDM) is available in three sensitivity options, each expressed as the minimum particle size it is capable of detecting:

  • 5 micrometers
  • 10 micrometers
  • 14 micrometers

The most sensitive version, with the ability to detect particles as small as 5 micrometers, meets the requirements of ISO 14644:17 of 2021.



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